Jingchi 40ZT
Category： Jingchi Series
Keywords:
Jingchi 40ZT
Product Features
Email：xjzm@synjoz.com
National Service Hotline：400-876-0066
Product Details
| Device Model | Jingchi 40Zt |
| Applicable Process |
MLB Inner/Outer Layer |
| Maximum Substrate/Exposure Area |
735*1300mm |
| Minimum Line Width and Spacing |
40μm |
| Line Width Uniformity |
±10% |
| Substrate Thickness |
0.05-6.0mm |
| Alignment Accuracy |
±15μm |
| Interlayer Alignment Accuracy |
30μm |
| Capacity @80mj |
5.0 panels/minute |
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