Jingchi 40H
Category: Jingchi Series
Keywords:
Jingchi 40H
Product Features
Email:xjzm@synjoz.com
National Service Hotline:400-876-0066
Product Details
| Device Model |
Jingchi 40H |
| Applicable Process |
MLB Inner/Outer Layer |
| Maximum Substrate/Exposure Area |
630*812mm |
| Minimum Line Width and Spacing |
40μm |
| Line Width Uniformity |
±10% |
| Substrate Thickness |
0.05-6.0mm |
| Alignment Accuracy |
±12μm |
| Interlayer Alignment Accuracy |
24μm |
| Capacity @120mj |
7.0 panels/minute |
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