Jingchi 15
Category: Jingchi Series
Keywords:
Jingchi 15
Product Features
Email:xjzm@synjoz.com
National Service Hotline:400-876-0066
Product Details
| Project |
Jingchi 15 |
| Applicable Process |
HDI inner/outer layer |
| Maximum substrate/exposure area |
630*730mm |
| Minimum line width and spacing |
15μm |
| Line width uniformity |
±10% |
| Substrate thickness |
0.05-5.0mm |
| Alignment accuracy |
±8μm |
| Interlayer alignment accuracy |
16μm |
| Capacity @80mj |
5.0 panels/minute |
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